The SemiProbe family of vacuum probing systems have expanded due to new application requirements – high volume MEMS testing, High Voltage testing and 300 mm. SemiProbe has a family of manual, semiautomatic and fully automatic vacuum probing systems primarily to test MEMS and High Voltage Devices.
MEMS Production Testing under Vacuum
Historical MEMS probing solutions involved manual and semiautomatic systems that were primarily used for research, device characterization and limited production. In the past two years systems were developed for production (24/7) applications that include material handling, pre-aligners, end-effectors, multiple black bodies, thermal (-60 C to 300 C), test equipment, customized graphical user interfaces (GUI) and vacuum levels to 10-6 torr. Most vacuum testing occurs between 10-3 torr and 10-6 torr. Individual manipulators (programmable) or a probe card are used to contact the device under test (DUT). Wafers tested range from 150 mm to 300 mm in size. Automated handling of the wafers is performed using a few methods – cassettes with wafers or cassettes with a carrier plates with wafers.
Multi-Purpose Vacuum Probing – up to 300mm wafers in open air
Sometimes customers like the ability to use the vacuum chamber as a multi-purpose probing solution for a variety of applications – open air and under vacuum. Basic I-V, C-V and HF measurements using coaxial, triaxial, kelvin and HF probe arms, cables and connectors are used for open air and low voltage applications. When vacuum is required, the chamber is cleaned and sealed and operated to vacuum levels as low as 10-6 torr. Similar basic measurements under vacuum can be made as well as high voltage up to 10 KV.
SemiProbe continues to expand our patented Probe System for Life (PS4L) family of probe systems, modules, and accessories. The PS4L probe system is the most modular in the world and is designed to reduce the cost of capital equipment. The systems are designed to provide a perpetual field upgrade path to address new applications and requirements.
SemiProbe’s mission is simple – they solve your wafer probing problems of today and tomorrow. Here’s how:
The starting point is listening to customers and asking lots of questions about your testing challenges – mechanics, optics, electronics, software and applications. From there, they design solutions and source pieces where they are best made. These then get assembled and fully tested to demonstrate – before it ships – that the prober works precisely like it is supposed to – and only then does it ship. This means probers can be put to use immediately after installation while avoiding surprises.
SemiProbe’s modular approach to probers means all of the key building blocks are interchangeable. This Lego-like method is your insurance against obsolescence, ensuring that the Probe System for Life (PS4L) prober can be field upgraded as requirements change.
Modular designs keep ongoing support costs low, as repairs or upgrades can often be accomplished by shipping a replacement component that your trained staff can install if problems ever do occur.
Founded in Burlington Vermont, USA in 2006, SemiProbe delivers customized probers at price points that often cost less than less flexible one-size fits all offerings. This approach has proven to be attractive to the top semiconductor companies, research institutions, and universities.
If such capabilities are of interest, let us know and we will schedule a meeting.
About E Test Reps:
ETR is a sales representative and marketing firm based in Austin, TX serving a world wide customer base. We seek out principals that avoid surprises while delivering ontime solutions that give customers more than they expect.