SURAGUS are specialists in high frequency (HF) eddy current testing systems. A wide measurement frequency range from 10 kHz to 100 MHz enables the characterization of diverse materials ranging from thick metal films to highly resistive semiconductors; all with only a single system. Additionally, frequency modulation enables penetration depth variation, which provides insight into vertical resistivity profiles.
SURAGUS tools measure:
magnetic permeability (beta)
Image: Metallization thickness measurement with near-edge characterization of PVD sputter deposited aluminum layer
HF eddy current systems only require approximately 20 ms per measurement and operate in a non-contact mode; two characteristics which are combined in SURAGUS’ mapping tools to create sheet resistance map images with anywhere from 49 to 90,000 measurement points. These measurement points are captured in just a few seconds or minutes, with the point density high enough to enable imaging without point-point interpolation. In contrast to conventional 4PP tools, the measurement quality is independent of the surface characteristics.
Left: Thickness imaging of Molybdenum on wafer, Middle: Sheet resistance imaging of Titanium on glass for PLP, Right: Sheet resistance imaging of Copper on glass for PLP
For wafer types Si, SiC, GaAs, GaN, glass, ceramic etc and for sizes 1” to 12”, SURAGUS’ full product portfolio includes manual single point tools, automated imaging tools and sensor integration kits for tool integration into existing or new tools.
The growing demand for high power devices drives the demand for advanced and cost-efficient SiC and GaN, AlGaN processing. Ingot, boule, puck and wafer monitoring up and down the supply chain is supported by surface imaging or wafer resistivity imaging uncovering the material specific characteristics.
Their solutions contribute to a sustainable use of resources in various industries. SURAGUS solutions for process control and quality assurance support efficient production processes with highest product qualities at high throughput and low scrap rates. Moreover, it is important to them that they offer an inspiring, professional work environment to their staff, which provides freedom for self-actualization as well as security and flexibility for their families.
SURAGUS GmbH is a German company that is specialized in providing solutions for nondestructive material testing. They got their start over a decade ago as a spin-off of the Fraunhofer-Society, one of the largest German research organizations.They use new technical opportunities and the technical advances in microelectronics, manufacturing and miniaturization technologies and computer technology to develop eddy current testing solutions optimized for customer needs.
The applied eddy current testing technology features a wide frequency range that encompasses high frequencies. This range flexibility combined with advanced measuring procedures allows for fast testing of both very low and well conductive materials.
Their portfolio comprises portable hand-held devices, table-sized benchtop testing solutions, robot based systems and standard and customized inline-solutions.
Quality is top notch. All of their processes are certified to DIN EN ISO 9001:2015 and are continuously monitored and enhanced.
We look forward to testing your samples and engaging with your company about your metrology requirements.
About E Test Reps:
ETR is a sales representative and marketing firm based in Austin, TX serving a world wide customer base. We seek out principals that avoid surprises while delivering ontime solutions that give customers more than they expect.