Eddy current measurement setups include single side and double sided setups. Both are widely used but there are advantages and disadvantages to each approach.
Double side transmission mode sensors and tools operate in large distances to the wafer and excel with high tolerance to vertical wafer surface positions. This means the same set can be used for immediate measurement of thin and thick wafers without requiring time consuming set up changes. With large sensor elements gaps up to 100 mm makes double sided transmission ideal for robot handling and the integration into process tools without requiring additional tool space or processing time.
Reflection mode tools are best for small spot sizes down to 1 mm. The tradeoff is that precise distance control and comes with limitations in sensitivity. This enables penetration depth modification, which allows focusing on resistivity measurements to the surface regions of SiC, GaAs and Si materials on ingot and boule level.
Requiring only 20 ms per measurement and operating in non-contact mode, SURAGUS systems can deliver far more detailed maps as compared to legacy tools. This key technology characteristics are combined in SURAGUS wafer imaging tools providing images with 49 to 90,000 measurement points in as little as a few seconds.
The growing demand for high power devices drives the demand for advanced and cost-efficient SiC and GaN, AlGaN processing. Ingot, boule, puck and wafer monitoring up and down the supply chain is supported by surface imaging or wafer resistivity imaging uncovering the material specific characteristics.
They are a German company that is specialized in providing solutions for non-contact electrical material imaging. They use new technical opportunities and the technical advances in microelectronics, manufacturing and miniaturization technologies and computer technology to develop eddy current testing solutions optimized for their customers’ needs.
SURAGUS: Advanced Eddy Current Systems
SURAGUS is a breath of fresh air in the niche semiconductor sheet resistance business.
These “new guys” on the block have now been in business for well over a decade, and have grown to a staff of over 40. One distinct advantage of coming to the market a decade ago is that their tools and technology are not based on outdated sensor/head technology and aging software. By using modern software tools and smaller heads with latest chip designs/sets, they can deliver far more value and allow one to get far closer to the edge of the wafer than one can achieve with alternative approaches.
SURAGUS are quite willing to put their technology to the test. Customers routinely send them samples to see what they are missing and how modern tools give more insight into determination of sheet resistance, thickness, and resistivity or conductivity of thin films on wafer, glass, foils and substrates and the like.
SURAGUS has installed more than 1,000 sensors and instruments around the world. Quality is also delivered out of the box as SURAGUS has implemented comprehensive quality management system practices in accordance with international standards.
If you are considering upgrading your non contact metrology, take a look at SURAGUS. You won’t be disappointed.
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