The never ending quest for more capable optoelectronic devices are challenging the prober companies to develop new methods of holding, integrating products and testing a variety of devices ranging from individual chips, modules, partial wafers and whole wafers up to 300 mm in size. Probing solutions range from R&D to Production. Some recent trends:
Topside and Bottomside Bias or light detection
Cold and Hot temperature testing in a double-sided probing application
Non-Contact Height Measurement Sensors to precisely control the fiber locationin regards to the device under test (DUT)
Integration of multi-axis Hexapods with fibers (single or multiple) with light optimization
Moving from a single-purpose probing solution to a multi-purpose probing solution
Customer Requirement: The customer wanted to test 200 mm silicon MEMS wafers under vacuum. They wanted the ability to test at low and high temperatures (-60 C to 200 C). They wanted the ability to use probe cards as well as programmable manipulators with DC and High Frequency (HF) probe arms. The probe system would need the ability to interface to a variety of Keithley and Keysight test instrumentation. The microscope bridge needed the ability to support optics, black bodies and a Polytec MEMS motion analyzer.
Semiautomatic 200 mm Vacuum Probing System
SA-8 Semiautomatic 200 mm Probe System
200 mm programmable X,Y,Z and theta stage
PILOT Software Suite – Navigator, Wafer Map, Autoalign and Programmable Manipulator Modules
Vibration Isolation Table
Large Vacuum Chamber with removable top and front- loading door for easy loading and unloading of devices
Thermal Chuck System that operates from -60 C to 200 C
All Components in the vacuum chamber rated to 10-6 torr
Agilent turbo-molecular vacuum pump
Large Microscope Gantry for the simultaneous mounting of optics, black bodies and motion analyzer
Compound Optics with CCTV System
Programmable Manipulators and Probe Cards
Four (4) programmable three axis manipulators with DC and HF probe arms, cables and probes
Probe Card Holder – 4.5” cards
Integrated with Keithley Instruments 4200 Parametric Analyzer
Denis Place, Mostafa Daoudi & Don Feuerstein founded SemiProbe in 2006 to address market voids in the analytical probing market. Collectively, before founding SemiProbe, they worked as managers at SUSS MicroTec North American Probing Division in Waterbury Center, VT for 35 years.
I’ve known Denis Place, one of the founders of SemiProbe, for going on four decades now. We first got introduced when Denis was a device engineer at Sprague, back in the day when they had a small fab in the Northeast. That was our first and only demo that I can recall which was interrupted by a fire alarm, sort of like the practice one’s that were popular in school.
We did not end up doing business with Sprague, but we have kept in touch over the years at conferences when Dennis joined the supplier side of the semiconductor space.
Denis has always impressed us by his willingness to stand behind his products and make things right for the customer. They are also really good at pushing the envelope in probing and delivering new capabilities first. They do so by listening closely to customers, and partnering with them and test equipment suppliers to deliver solid probe stations that work year after year.
And they stand behind their offerings with their “prober for life” practice, which is another way of saying their probe stations never need to become obsolete and can be readily repurposed as requirements advance and evolve.
We will be happy to coordinate discussions with you about SemiProbe – just let us know!
About E Test Reps:
ETR is a sales representative and marketing firm based in Austin, TX serving a world wide customer base. We seek out principals that avoid surprises while delivering ontime solutions that give customers more than they expect.