Mastering competing priorities requires intimate understanding of your product and process, as well as real-time information.
SURAGUS’ non-contact eddy current technology allows early-stage detection, layer monitoring, and process control. When integrated into a PVD cluster tool, this type of electrical characterization offers:
incredible accuracy without risking harm to sensitive films, and without tool downtime
measurements for encapsulated films and multilayer systems
high-speed measurements with no contact to layers to help you examine your product and process inside and out.
EddyCus® Map 2530 Series
Non-Contact Sheet Resistance and Metal Layer Thickness Mapping
The EddyCus® map 2530 Series is a versatile mapping and imaging tool designed to help you master your product. These fast, precise mapping devices will help you achieve higher coating and substrate quality using SURAGUS’ non-contact eddy current technology and powerful, easy-to-use software.
This high-resolution mapping technology can image substrates up to 12 inches, can characterize hidden and encapsulated conductive layers, and can be used to evaluate sheet resistance, metal thickness, and resistivity conductivity of wafers, boules, ingots, layers, etc.
Earlier this year, we had the chance to visit SURAGUS in Dresden, Germany. The Dresden area, nicknamed Silicon Saxony, is home to more than 300 microelectronics companies and a highly skilled workforce of over 40,000 employees. It’s one of the oldest and most prominent centers for semiconductor manufacturing in the world.
For Marcus Klein, the managing director, it was an obvious choice for SURAGUS to lay its foundation. Surrounded by customers, universities, and an amazing workforce, SURAGUS has grown to be a driver of this economic engine for more than a decade.
Something we love about their testing technology is how it extends what’s possible. The sensors can get really close to the edge of a wafer, yielding more sellable die per wafer. And their software improvements allow engineers to examine results in new and powerful ways.
If you have particular requirements to discuss, please let us know. We’d be happy to arrange and online conversation with SURAGUS technologists, and if appropriate, we can make arrangements for measurement of your samples.
ETR is a sales representative and marketing firm based in Austin, TX serving a world wide customer base. We seek out principals that avoid surprises while delivering ontime solutions that give customers more than they expect.